• Dry Vacuum Pump
  • Dry Vacuum Pump
  • Dry Vacuum Pump

Dry Vacuum Pump


Main USES: When the pump is working, there is no friction between them, the operation is stable, the noise is low, and the working chamber does not need lubricating oil.

Payment Terms : L/C,T/T,

1. Double-wound scroll pump, including 1 track screw and 2 fixed screw.
2. It can be operated at atmospheric pressure.
3. High limit vacuum can be realized.
4. Low vibration and low noise.
5. Maintenance cycle can be controlled by timetable.
1. Analytical equipment
2. Gas Recovery System
3. Coating equipment
4. TMP front stage pump
5. Helium Leakage Detector
6. Semiconductor Manufacturing Technology

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Item Technical Specifications
Model EVP-150 EVP-300 EVP-600 EVP-1000
Nominal capacity 2 L/s 4 L/s 8 L/s 16 L/s
Ultimate pressure ≤ 10Pa ≤ 3Pa ≤ 3Pa ≤ 1Pa
Leak rate 1X10-6 Pa.m3/S (for special gas can reach to 1X10-8Pa.m3/S)
Water vapor treatment capacity (gas ballast open) 5g/day 25g/day 25g/day 25g/day
Motor Data 0.25KW 0.55KW 0.75KW 1.5KW
Rotary speed 1450rpm (50Hz) 1450rpm (50Hz) 1450rpm (50Hz) 1450rpm (50Hz)
Temperature 5~40℃ 5~40℃ 5~40℃ 5~40℃
Noise <55dB <65dB <65dB <68dB
Noise (gas ballast) <60dB <70dB <70dB <74dB
Gas inlet connecting flange KF25 KF25 KF40 KF40
Gas outlet connecting flange KF16 KF25 KF25 KF40
Dimension(LXWXH) 380X210X270 (mm) 470X270X364 (mm) 490X340X370 (mm) 560X390X420 (mm)
Weight 16Kg 35Kg 44Kg 64Kg