Main USES: When the pump is working, there is no friction between them, the operation is stable, the noise is low, and the working chamber does not need lubricating oil.
1. Double-wound scroll pump, including 1 track screw and 2 fixed screw.
2. It can be operated at atmospheric pressure.
3. High limit vacuum can be realized.
4. Low vibration and low noise.
5. Maintenance cycle can be controlled by timetable.
1. Analytical equipment
2. Gas Recovery System
3. Coating equipment
4. TMP front stage pump
5. Helium Leakage Detector
6. Semiconductor Manufacturing Technology
|Nominal capacity||2 L/s||4 L/s||8 L/s||16 L/s|
|Ultimate pressure||≤ 10Pa||≤ 3Pa||≤ 3Pa||≤ 1Pa|
|Leak rate||1X10-6 Pa.m3/S (for special gas can reach to 1X10-8Pa.m3/S)|
|Water vapor treatment capacity (gas ballast open)||5g/day||25g/day||25g/day||25g/day|
|Rotary speed||1450rpm (50Hz)||1450rpm (50Hz)||1450rpm (50Hz)||1450rpm (50Hz)|
|Noise (gas ballast)||＜60dB||＜70dB||＜70dB||＜74dB|
|Gas inlet connecting flange||KF25||KF25||KF40||KF40|
|Gas outlet connecting flange||KF16||KF25||KF25||KF40|
|Dimension（LXWXH）||380X210X270 (mm)||470X270X364 (mm)||490X340X370 (mm)||560X390X420 (mm)|